Advanced MEMS/NEMS Fabrication and Sensors

Éditeur :

Springer

Paru le : 2021-10-12

This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on nove...
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Auteur

Éditeur

Collection
n.c

Parution
2021-10-12

Pages
312 pages

EAN papier
9783030797485

Auteur(s) du livre


?Zhuoqing Yang, PhD, received his BSc and MSc degrees in electromechanical engineering from Harbin Engineering University (HEU), Harbin, China, and his PhD in microelectronics and solid state electronics from Shanghai Jiao Tong University (SJTU). He was as an Assistant Professor at SJTU before becoming a JSPS Postdoctoral Fellow at the National Institute of Advanced Industrial Science and Technology (AIST) in Japan from 2011 to 2013. He returned to SJTU in 2014, where he is now a Full Professor in the School of Electronic Information and Electrical Engineering. Dr. Yang is also Resident Researcher at the National Key Laboratory of Science and Technology on Micro/Nano Fabrication, China. His research is focused on the design, simulation and fabrication of MEMS/NEMS sensors and actuators and 3D fabrications on the surface of flexible fiber for biomedical applications. Dr. Yang is an active Senior Member of the IEEE, a frequent contributor to international journals and conferences, and an editorial board member for the  Micro and Nanosystems (MNS) and The Open Materials Science Journal.

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EAN PDF
9783030797492
Prix
158,24 €
Nombre pages copiables
3
Nombre pages imprimables
31
Taille du fichier
16998 Ko
EAN EPUB
9783030797492
Prix
158,24 €
Nombre pages copiables
3
Nombre pages imprimables
31
Taille du fichier
97454 Ko

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