Télécharger le livre :  Advanced MEMS/NEMS Fabrication and Sensors
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This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The...

Editeur : Springer
Parution : 2021-10-12

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