Télécharger le livre :  Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope
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This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design...

Editeur : Springer
Parution : 2023-04-17

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