Télécharger le livre :  Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets
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This thesis describes the fabrication of metal-insulator-semiconductor (MIS) structures using very high permittivity dielectrics (based on rare earths) grown by high-pressure sputtering from metallic targets. It demonstrates the possibility of depositing high...

Editeur : Springer
Parution : 2017-10-04
Collection : Springer Theses
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