Télécharger le livre :  The Chemistry of Metal CVD
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High purity, thin metal coatings have a variety of important commercial applications, for example, in the microelectronics industry, as catalysts, as protective and decorative coatings as well as in gas-diffusion barriers. This book offers detailed, up- to-date coverage...

Editeur : Wiley-VCH
Parution : 2008-09-26

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