Télécharger le livre :  Piezoelectric MEMS Resonators
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This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to...

Editeur : Springer
Parution : 2017-01-09
Collection : Microsystems and Nanosystems
PDF, ePub

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