Tous les ebooks de la collection "Microsystems and Nanosystems" - Springer

2 Livre(s)
Télécharger le livre : Process Variations in Microsystems Manufacturing
Ajouter à ma liste d'envies
Process Variations in Microsystems Manufacturing
Michael Huff
This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these...

Editeur : Springer
Parution : 2020-04-09
Collection : Microsystems and Nanosystems
PDF, ePub

147,69 €
Télécharger le livre : Piezoelectric MEMS Resonators
Ajouter à ma liste d'envies
Piezoelectric MEMS Resonators
Harmeet Bhugra , Gianluca Piazza
This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to...

Editeur : Springer
Parution : 2017-01-09
Collection : Microsystems and Nanosystems
PDF, ePub

126,59 €