Télécharger le livre :  Process Variations in Microsystems Manufacturing
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This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these...

Editeur : Springer
Parution : 2020-04-09
Collection : Microsystems and Nanosystems
PDF, ePub

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