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Microsystems Dynamics
Rolanas Dauksevicius , Vytautas Ostasevicius
In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large...

Editeur : Springer
Parution : 2010-11-01
Collection : Intelligent Systems, Control and Automation: Science and Engineering
ePub

94,94 €