Ebooks de Shyam P. Murarka en PDF

1 Livre(s)
Télécharger le livre : Chemical Mechanical Planarization of Microelectronic Materials
Ajouter à ma liste d'envies
Chemical Mechanical Planarization of Microelectronic Materials
Ronald J. Gutmann , Shyam P. Murarka , Joseph M. Steigerwald
Chemical Mechanical Planarization (CMP) plays an important role in today's microelectronics industry. With its ability to achieve global planarization, its universality (material insensitivity), its applicability to multimaterial surfaces, and its relative...

Editeur : Wiley-VCH
Parution : 2008-09-26

PDF

174,02 €